SCIS High Precision Environmental Control Equipment
Nanjing Expansion has always adhered to technological innovation as the primary driving force, relying on its profound foundation and unique advantages in HVAC design, combined with the extensive needs and pain points of customers, and independently developed related products: SCIS high-precision environmental control equipment. (For more details, please click here) http://www.jicenj.com/ )
The equipment mainly consists of the main cabinet, control system, air circulation system, clean filter, refrigeration (heating) system, lighting system, local air bath, etc., providing a high-precision temperature, humidity, and cleanliness working environment for precision measurement and precision manufacturing equipment such as lithography machines and laser interferometers. The device internally guides the airflow to circulate in a certain direction through a fan, and the control system processes each link of the circulating airflow to achieve ultra-high control accuracy of the temperature and humidity inside the cabinet.
Ultra high precision temperature and humidity control
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Ultra high level of cleanliness control
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Real-time data record query
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Appearance custom detachable
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Quiet and efficient equipment operation
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automatic safety protection system
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Naming | SCIS | H | A | A | 100 |
code point | 1 | 2 | 3 | 4 | 5 |
Code 1 | SCIS-Brand | ||||
Code 2 | H-high precision ring control series | ||||
Code 3 | Refrigeration mode number A- air cooling type, refrigerant medium is water B- water cooling type, refrigerant medium is water C- air cooling type, refrigerant medium is Freon D-water cooling type, refrigerant medium is Freon E-user provided chilled water | ||||
Code 4 | Temperature accuracy No. A- Accuracy greater than ± 0.01 B- Accuracy less than ± 0.01, greater than ± 0.05 C- Accuracy less than ± 0.05 | ||||
Code 5 | Equipment scale number 100-small equipment (general refrigerating capacity less than 5KW)200-medium equipment (general refrigerating capacity between 5KV-10KW) 300-large equipment (general refrigerating capacity above 10KW) |
The equipment shall be placed in a laboratory with certain temperature and humidity accuracy and cleanliness requirements for operation. | |
Ambient temperature and humidity conditions | ± 2 ℃ DB temperature change rate within 0.5 ℃/8h |
± 5% RH humidity change rate 59% within 8h | |
Ambient cleanliness conditions | ISO class6 |
Environmental noise | ≤ 60dB |
Power supply | Three-phase five-wire system 380VAC-50Hz or 220VAC-50Hz (depending on equipment) |
Power supply voltage | Maximum allowable fluctuation range is ± 10% |
Storage ambient temperature | Equipment refrigeration unit -40 ℃-70 ℃ touch screen -20 ℃-60 ℃, no condensation |
Operating ambient temperature | Controller -20 ℃-60 ℃ Touch screen 0 ℃-50 ℃, no condensation |
Typical application

chip semiconductor

Precision measurement

Precision Manufacturing

Research and development
Immediate Consultation
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