SCIS High Precision Environmental Control Equipment
SCIS high-precision environmental control equipment is a self-developed precision environmental control product, which is mainly composed of equipment main cabinet, control system, air circulation system clean filter, refrigeration (heat) system, lighting system, local air bath, etc. It provides ultra-high precision temperature, humidity and cleanliness working environment for precision measurement and precision manufacturing equipment such as lithography machine and laser interferometer. The air flow is guided by the fan inside the device to circulate in a certain direction, and the control system processes each link of the circulating air flow, so that the temperature and humidity in the cabinet can achieve ultra-high control accuracy.
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Ultra high precision temperature and humidity control
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Ultra high level of cleanliness control
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Real-time data record query
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Appearance custom detachable
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Quiet and efficient equipment operation
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automatic safety protection system
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Independent research and development of high precision temperature control technology, control output accuracy 0 . 1%
| Naming | SCIS | H | A | A | 100 |
| code point | 1 | 2 | 3 | 4 | 5 |
| Code 1 | SCIS-Brand | ||||
| Code 2 | H-high precision ring control series | ||||
| Code 3 | Refrigeration mode number A- air cooling type, refrigerant medium is water B- water cooling type, refrigerant medium is water C- air cooling type, refrigerant medium is Freon D-water cooling type, refrigerant medium is Freon E-user provided chilled water | ||||
| Code 4 | Temperature accuracy No. A- Accuracy greater than ± 0.01 B- Accuracy less than ± 0.01, greater than ± 0.05 C- Accuracy less than ± 0.05 | ||||
| Code 5 | Equipment scale number 100-small equipment (general refrigerating capacity less than 5KW)200-medium equipment (general refrigerating capacity between 5KV-10KW) 300-large equipment (general refrigerating capacity above 10KW) | ||||
| The equipment shall be placed in a laboratory with certain temperature and humidity accuracy and cleanliness requirements for operation. | |
| Ambient temperature and humidity conditions | ± 2 ℃ DB temperature change rate within 0.5 ℃/8h |
| ± 5% RH humidity change rate 59% within 8h | |
| Ambient cleanliness conditions | ISO class6 |
| Environmental noise | ≤ 60dB |
| Power supply | Three-phase five-wire system 380VAC-50Hz or 220VAC-50Hz (depending on equipment) |
| Power supply voltage | Maximum allowable fluctuation range is ± 10% |
| Storage ambient temperature | Equipment refrigeration unit -40 ℃-70 ℃ touch screen -20 ℃-60 ℃, no condensation |
| Operating ambient temperature | Controller -20 ℃-60 ℃ Touch screen 0 ℃-50 ℃, no condensation |
Typical application
chip semiconductor
Precision measurement
Precision Manufacturing
Research and development
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nanjing expansion technology co ltd
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