Nanzhi Institute of Advanced Optoelectronic Integrated Technology
The existing nanofabrication and nano-characterization clean room area exceeds 3000 square meters. The temperature fluctuation range of the thousands-level zone of the clean room can be maintained at ± 0.5 ℃/h, the temperature of the hundred-level zone can be maintained at ± 0.3 ℃/h, and the electron beam lithography zone is ± 0.1 ℃/h. Micro-nano processing clean room equipment contains lithography, dry etching, deposition, characterization and other common micro-nano processing equipment.
Committed to becoming a leader in the field of laboratory construction in China
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nanjing expansion technology co ltd
Address: 6th Floor, Anke Building, 31 Guangju Road, jianye district, Nanjing